Dry Etch TPT Training Introduction to wafer loading and temperature controller - バイリンガル字幕
You This is an ICP in the cleanroom, it has a load lock and an operator station.
The rest of the tool is hidden in the service area and you don't need to think about that.
To load a wafer, you go to the user software, press the manual button and the transport tab.
Currently the load lock is on the vacuum, so we press the load button.
The load button will automatically put the load log to atmosphere,
the lid will pop up automatically, so it's not a good idea to put your wafers on top of the lid.
As the pressure in the load log increases,
the overall load that seals the opening between the lid and the load lock will force the lid to open and you can see that.
Once the lid is open you can place your wafers.
It's important that the flatter of the wafer is always positioned towards the center of the carousel.
In the software it is indicated, this indicator will inform you that when you close the lid, it will automatically pump down and map.
The carousel spins around and there's a sensor that sits down here that will detect whether there's a wafer present or not in the slots.
the wafer is indicated in the software like this and is given an ID it takes a
while the base pressure in the load like is 80 milli torque so when it reaches that pressure the transfer is complete.
The process is complete and we are ready to take the dummy wafer out of the load lock and replace it with the wafer.
To do that you press on the wafer you want to move,
and you click on the destination that makes a valid transfer There we Now we can transfer our wafer from the load lock.
I click here and then there.
Transfer from Carousel slot 2 to ICP1 chamber.
I'll see you in the And we're ready to go.
On the AOE and the ASE the first thing that you do when you come to the tool
is to change the temperature to the correct electrode temperature.
It takes a certain time to stabilize and you can benefit from the time when it's
stabilizing to load and unload wafers from the load log.
To change the set point, you go to the controller, you press temp.
Now want to process at 0 degrees, so I press 0 to change the set point and enter ENT.
This changes the set point and the the the chiller circuit will start to stabilize.
It's important to remember that you cannot process while it's stabilizing.
If you start a process with a set point that is different from the from the temperature the tool will come up with alarms when
your processes are complete you need to return the tiller to the default
temperature to do that you do that the same thing you press temp
and enter this is Pegasus one it has a very nice feature the cassette loader as
with the other ICPs it has and a load lock and an operator computer.
The cassette loader has a possibility of having a 16-inch wafer cassette or a 4-inch wafer cassette.
It allows us to operate or to process a whole batch of wafers without attending the computer.
In addition to the operator station you have an office PC that enables you to log on and log off
lap energy and to fill in the process lock and there's also An end-point detection system that is operated on this computer.
To load wafers to the cassette loader, you take out the cassette.
Transfer the wafers to the dedicated cassette,
you should only use this black cassette for as with the other ICPs it's important that the flat is always pointed in the right direction
so we have to align the flats on this one.
The cassette is put in the way in such a way that the ends of the
of the cassette is aligned to this so it goes down like this and when you put
the cassette down always make sure that it sits right close the doors Go to the transport tab and press map concept 2.
You It's good.
I'll see In the software on the manual and transport page, all the wafers pop up at cassette 2.
From here they may be processed either using batch processes,
that means automated runs of a whole batch of wafers with process recipes or you can choose to load them manually by clicking.
You
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